New Test Structures for Evaluating the Scaling Limit of a Narrow U-Groove Isolation Structure Yoichi TAMAKITakashi HASHIMOTO
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1999/04/25 Vol. E82-CNo. 4pp. 612-617 Type of Manuscript: Special Section PAPER (Special Issue on Microelectronic Test Structures) Category: Keyword: isolation capacitance, SOI, bipolar transistor, trench structure,