Keyword : isolation capacitance


New Test Structures for Evaluating the Scaling Limit of a Narrow U-Groove Isolation Structure
Yoichi TAMAKI Takashi HASHIMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/04/25
Vol. E82-C  No. 4 ; pp. 612-617
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: 
Keyword: 
isolation capacitanceSOIbipolar transistortrench structure
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