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IEICE Trans

Tatsuo OKAHASHI

Automatic Defect Classification in Visual Inspection of Semiconductors Using Neural Networks
Keisuke KAMEYAMA Yukio KOSUGI Tatsuo OKAHASHI Morishi IZUMITA 
Publication:   IEICE TRANSACTIONS on Information and Systems
Publication Date: 1998/11/25
Vol. E81-D  No. 11  pp. 1261-1271
Type of Manuscript:  PAPER
Category: Image Processing,Computer Graphics and Pattern Recognition
Keyword: 
machine vision, semiconductor manufacturing, defect classification, higher-order neural network,  clustering, ADC, 
 Summary | Full Text:PDF