Keyword : defect classification


Automatic Defect Classification in Visual Inspection of Semiconductors Using Neural Networks
Keisuke KAMEYAMA Yukio KOSUGI Tatsuo OKAHASHI Morishi IZUMITA 
Publication:   IEICE TRANSACTIONS on Information and Systems
Publication Date: 1998/11/25
Vol. E81-D  No. 11 ; pp. 1261-1271
Type of Manuscript:  PAPER
Category: Image Processing,Computer Graphics and Pattern Recognition
Keyword: 
machine visionsemiconductor manufacturingdefect classificationhigher-order neural network clusteringADC
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