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IEICE Trans

Takeshi MATSUSHITA

Bonded SOI with Polish-Stopper Technology for ULSI
Yoshihiro MIYAZAWA Makoto HASHIMOTO Naoki NAGASHIMA Hiroshi SATO Muneharu SHIMANOE Katsunori SENO Fumio MIYAJI Takeshi MATSUSHITA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/12/25
Vol. E75-C  No. 12  pp. 1522-1528
Type of Manuscript:  Special Section PAPER (Special Issue on SOI (Si on Insulator) Devices)
Category: SOI LSIs
Keyword: 
SOI, wafer bonding, polish-stopper, 256 kb SRAM 4 Mb SRAM cell, 
 Summary | Full Text:PDF