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IEICE Trans

Shigenori SAWACHI

Fabrication of Nb/AlOx/Nb Josephson Tunnel Junctions by Sputtering Apparatus with Load-Lock System
Akiyoshi NAKAYAMA Naoki INABA Shigenori SAWACHI Kazunari ISHIZU Yoichi OKABE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/08/25
Vol. E77-C  No. 8  pp. 1164-1168
Type of Manuscript:  Special Section PAPER (Special Section on Superconducting Devices)
Category: LTS
Keyword: 
Josephson junctions, tunnel barrier, Nb, load-lock system, substrate temperature, 
 Summary | Full Text:PDF