Kazunari ISHIZU


Fabrication of Nb/AlOx/Nb Josephson Tunnel Junctions by Sputtering Apparatus with Load-Lock System
Akiyoshi NAKAYAMA Naoki INABA Shigenori SAWACHI Kazunari ISHIZU Yoichi OKABE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/08/25
Vol. E77-C  No. 8  pp. 1164-1168
Type of Manuscript:  Special Section PAPER (Special Section on Superconducting Devices)
Category: LTS
Keyword: 
Josephson junctionstunnel barrierNbload-lock systemsubstrate temperature
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