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IEICE Trans

Masato SAKAO

A Capacitor over Bit-Line (COB) Stacked Capacitor Cell Using Local Interconnect Layer for 64 MbDRAMs
Naoki KASAI Masato SAKAO Toshiyuki ISHIJIMA Eiji IKAWA Hirohito WATANABE Toshio TAKESHIMA Nobuhiro TANABE Kazuo TERADA Takamaro KIKKAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C  No. 4  pp. 548-555
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
DRAM, memory cell, stacked capacitor, local interconnect, 
 Summary | Full Text:PDF