Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2003/10/01 Vol. E86-CNo. 10pp. 2071-2076 Type of Manuscript: Special Section PAPER (Special Issue on Heterostructure Microelectronics with TWHM2003) Category: Keyword: AlGaN/GaN, HEMT, AlN, template,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2003/10/01 Vol. E86-CNo. 10pp. 2077-2081 Type of Manuscript: Special Section PAPER (Special Issue on Heterostructure Microelectronics with TWHM2003) Category: Keyword: AlGaN/GaN, heterostructure, MOVPE, uniformity, bowing,