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IEICE Trans

Kazuki YOSHIDA

Low-Temperature Deposition of Yttrium Oxide on Flexible PET Films Using Time-Separated Yttrium Precursor and Oxidizer Injections
Kentaro SAITO Kazuki YOSHIDA Masanori MIURA Kensaku KANOMATA Bashir AHMMAD Shigeru KUBOTA Fumihiko HIROSE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2022/10/01
Vol. E105-C  No. 10  pp. 604-609
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
low-temperature deposition, yttrium oxide, plasma excited humidified argon, 
 Summary | Full Text:PDF
Low-Temperature Atomic Layer Deposition of AlN Using Trimethyl Aluminum and Plasma Excited Ar Diluted Ammonia
Kentaro SAITO Kazuki YOSHIDA Masanori MIURA Kensaku KANOMATA Bashir AHMMAD Shigeru KUBOTA Fumihiko HIROSE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2022/10/01
Vol. E105-C  No. 10  pp. 596-603
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
low-temperature atomic layer deposition, aluminum nitride, plasma excited ammonia, 
 Summary | Full Text:PDF
Ambipolar Conduction of λ-DNA Transistor Fabricated on SiO2/Si Structure
Naoto MATSUO Kazuki YOSHIDA Koji SUMITOMO Kazushige YAMANA Tetsuo TABEI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2022/08/01
Vol. E105-C  No. 8  pp. 369-374
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
λ-DNA transistor, ambipolar conduction, polaron hopping, electron affinity, 
 Summary | Full Text:PDF
Room Temperature Atomic Layer Deposition of Nano Crystalline ZnO and Its Application for Flexible Electronics
Kazuki YOSHIDA Kentaro SAITO Keito SOGAI Masanori MIURA Kensaku KANOMATA Bashir AHMMAD Shigeru KUBOTA Fumihiko HIROSE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2021/07/01
Vol. E104-C  No. 7  pp. 363-369
Type of Manuscript:  PAPER
Category: Electronic Materials
Keyword: 
room temperature process, atomic layer deposition, crystallization, ZnO, 
 Summary | Full Text:PDF