Masanori MIURA

Room Temperature Atomic Layer Deposition of Nano Crystalline ZnO and Its Application for Flexible Electronics
Kazuki YOSHIDA Kentaro SAITO Keito SOGAI Masanori MIURA Kensaku KANOMATA Bashir AHMMAD Shigeru KUBOTA Fumihiko HIROSE 
Publication:   
Publication Date: 2021/07/01
Vol. E104-C  No. 7  pp. 363-369
Type of Manuscript:  PAPER
Category: Electronic Materials
Keyword: 
room temperature process, atomic layer deposition, crystallization, ZnO, 
 Summary | Full Text:PDF
Room-Temperature Atomic Layer Deposition of SnO2 Using Tetramethyltin and Its Application to TFT Fabrication
Kentaro TOKORO Shunsuke SAITO Kensaku KANOMATA Masanori MIURA Bashir AHMMAD Shigeru KUBOTA Fumihiko HIROSE 
Publication:   
Publication Date: 2018/05/01
Vol. E101-C  No. 5  pp. 317-322
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
ALD, SnO2, IR absorption spectroscopy, TFT, 
 Summary | Full Text:PDF