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IEICE Trans

Keyword : multi level wiring

EB-Testing-Pad Method and its Evaluation by Actual Devices
Norio KUJI Takako ISHIHARA Shigeru NAKAJIMA 
Publication:   IEICE TRANSACTIONS on Information and Systems
Publication Date: 2002/10/01
Vol. E85-D  No. 10 ; pp. 1558-1563
Type of Manuscript:  Special Section PAPER (Special Issue on Test and Verification of VLSI)
Category: EB Tester
Keyword: 
E-beam tester, observability, stacked vias, testing pads, multi level wiring, 
 Summary | Full Text:PDF