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IEICE Trans

Keyword : LSI pattern

An Automated Thresholding Approach for Segmenting Deteriorated SEM Images in X-Ray Mask Visual Inspection
Minoru ITO 
Publication:   IEICE TRANSACTIONS on Information and Systems
Publication Date: 1996/06/25
Vol. E79-D  No. 6 ; pp. 866-872
Type of Manuscript:  PAPER
Category: Image Processing,Computer Graphics and Pattern Recognition
Keyword: 
visual inspection, threshold, SEM, LSI pattern, 
 Summary | Full Text:PDF