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IEICE Trans

Keyword : weak boundary layer

Study on Surface Characteristic of the Copper Nitride Films by Absorbed Oxygen
Musun KWAK Jongho JEON Kyoungri KIM Yoonseon YI Sangjin AN Donsik CHOI Youngseok CHOI Kyongdeuk JEONG 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/11/01
Vol. E95-C  No. 11 ; pp. 1744-1748
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
copper nitride, weak boundary layer, oxygen, atmospheric pressure plasma, excimer ultraviolet, XPS, AFM, 
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