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IEICE Trans

Keyword : transient reflectivity

Laser Doping for Ultra-Shallow Junctions Monitored by Time Resolved Optical Measurements
Dominique DEBARRE Gurwan KERRIEN Takashi NOGUCHI Jacques BOULMER 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/05/01
Vol. E85-C  No. 5 ; pp. 1098-1103
Type of Manuscript:  Special Section PAPER (Special Issue on Advanced Sub-0.1 µm CMOS Devices)
Category: 
Keyword: 
laser doping, ultra-shallow junction, GILD, transient reflectivity, chemisorption, 
 Summary | Full Text:PDF