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IEICE Trans

Keyword : topography simulation

An Advancing Front Meshing Algorithm Using NURBS for Semiconductor Process Simulation
Sangho YOON Jaehee LEE Sukin YOON Ohseob KWON Taeyoung WON 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/08/25
Vol. E83-C  No. 8 ; pp. 1349-1355
Type of Manuscript:  Special Section PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99))
Category: Numerics
Keyword: 
NURBS surface, mesh generation, advancing front, topography simulation, capacitance extraction, 
 Summary | Full Text:PDF
METROPOLE-3D: An Efficient and Rigorous 3D Photolithography Simulator
Andrzej J. STROJWAS Xiaolei LI Kevin D. LUCAS 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/06/25
Vol. E82-C  No. 6 ; pp. 821-829
Type of Manuscript:  INVITED PAPER (Special Issue on TCAD for Semiconductor Industries)
Category: 
Keyword: 
modeling, topography simulation, manufacturability, reflective notching, anti-reflective layer, defect, 
 Summary | Full Text:PDF