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IEICE Trans

Keyword : surface cleaning

Synchrotron Radiation Stimulated Evaporation of a-SiO2 Films and Its Application for Si Surface Cleaning
Housei AKAZAWA Yuichi UTSUMI Jun-ichi TAKAHASHI Tsuneo URISU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/07/25
Vol. E75-C  No. 7 ; pp. 781-789
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra Clean Technology)
Category: 
Keyword: 
photostimulated evaporation, a-SiO2, surface cleaning, gas-source MBE, 
 Summary | Full Text:PDF