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IEICE Trans

Keyword : surface charging

Effects of 50 to 200-keV Electrons by BEASTLI Method on Semiconductor Devices
Fumio MIZUNO Satoru YAMADA Tsunao ONO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 392-397
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Device Issues
Keyword: 
semiconductor devices, wafer inspection, scanning electron microscope, high-energy electron beam, device damage, surface charging, BEASTLI, 
 Summary | Full Text:PDF