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| Keyword : substrate orientation
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A Study on Substrate Orientation Dependence of Si Surface Flattening Process by Sacrificial Oxidation and Its Effect on MIS Diode Characteristics
Sohya KUDOH Shun-ichiro OHMI | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2016/05/01
Vol. E99-C
No. 5 ;
pp. 504-509
Type of Manuscript:
Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category:
Keyword:
Si surface roughness, oxidation process, substrate orientation, MIS diode, | | | Summary | Full Text:PDF | |
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