Errors in Pi-Coefficients Due to the Strain Effects in Resistor Stress Sensor on (001) Silicon Chun-Hyung CHOHo-Young CHA
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2011/05/01 Vol. E94-CNo. 5 ;
pp. 791-795 Type of Manuscript: Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices) Category: Keyword: stress sensor, strain effects, (001) silicon, piezoresistive coefficients,