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IEICE Trans

Keyword : stacked layer

PdYb-Silicide with Low Schottky Barrier Height to n-Si Formed from Pd/Yb/Si(100) Stacked Structures
Shun-ichiro OHMI Mengyi CHEN Weiguang ZUO Yasushi MASAHIRO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2017/05/01
Vol. E100-C  No. 5 ; pp. 458-462
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
PdYb-silicide, contact resistivity, Schottky barrier height, stacked layer, RF magnetron sputtering, 
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