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IEICE Trans

Keyword : solid-state laser

A Novel Selected Area Laser Assisted (SALA) System for Crystallization and Doping Processes in Low-Temperature Poly-Si Thin-Film Transistors
Ryoichi ISHIHARA Arie GLAZER Yoel RAAB Peter RUSIAN Mannie DORFAN Benzi LAVI Ilya LEIZERSON Albert KISHINEVSKY Yvonne van ANDEL Xin CAO Wim METSELAAR Kees BEENAKKER Sara STOLYAROVA Yael NEMIROVSKY 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2006/10/01
Vol. E89-C  No. 10 ; pp. 1377-1382
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
polycrystalline-Si, thin-film transistors, gas immersed laser doping, solid-state laser, 
 Summary | Full Text:PDF