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IEICE Trans

Keyword : silicon layer

Thinned Silicon Layers on Oxide Film, Quartz and Sapphire by Wafer Bonding
Takao ABE Yasuyuki NAKAZATO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 342-349
Type of Manuscript:  INVITED PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: 
Keyword: 
SOI, Si on quartz, SOS, wafer bonding, dislocation-free, silicon layer, 
 Summary | Full Text:PDF