Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2000/08/25 Vol. E83-CNo. 8 ;
pp. 1183-1188 Type of Manuscript: Special Section PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99)) Category: Gate Tunneling Simulation Keyword: semiconductor materials and devices, silicon dioxide, Boltzmann equation, spherical-harmonics expansion,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1995/02/25 Vol. E78-CNo. 2 ;
pp. 128-131 Type of Manuscript: Special Section PAPER (Special Issue on Micromachines and Micro Electro Mechanical Systems) Category: Keyword: electrostatic actuator, electret, silicon dioxide, relay, latching,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1994/03/25 Vol. E77-CNo. 3 ;
pp. 464-472 Type of Manuscript: Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies) Category: Process Technology Keyword: silicon dioxide, dielectric breakdown, metal contamination, magnesium, zinc,