Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 56

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 202

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 296

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 315
IEICE Trans

Keyword : self-align

A Proposal of TC-MOSFET and Fabrication Process of Twin Si Channels
Shun-ichiro OHMI Tetsushi SAKAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/05/01
Vol. E90-C  No. 5 ; pp. 994-999
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: Novel MOSFET Structures
Keyword: 
twin-channel, self-align, SOI, Ω-gate, SiN, wet etching, 
 Summary | Full Text:PDF