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IEICE Trans

Keyword : reactive ECR sputtering

Reactive ECR-Sputter-Deposition of Ni-Zn Ferrite Thin-Films for Backlayer of PMR Media
Hirofumi WADA Setsuo YAMAMOTO Hiroki KURISU Mitsuru MATSUURA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/09/01
Vol. E86-C  No. 9 ; pp. 1846-1850
Type of Manuscript:  Special Section PAPER (Special Issue on Recent Progress of High-Density Disk Storage)
Category: 
Keyword: 
Ni-Zn ferrite thin-film, reactive ECR sputtering, perpendicular magnetic recording, recording media, backlayer, 
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