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IEICE Trans

Keyword : phase-shift mask

Improved Resolution Enhancement Technique for Broadband Illumination in Flat Panel Display Lithography
Kanji SUZUKI Manabu HAKKO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2022/02/01
Vol. E105-C  No. 2 ; pp. 59-67
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
lithography, resolution enhancement technique, off-axis illumination, phase-shift mask, broadband illumination, 
 Summary | Full Text:PDF