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IEICE Trans

Keyword : phase-modulated excimer laser crystallization

High-Resolution Beam Profiler for Engineering Laterally-Grown Grain Morphology
Masayuki JYUMONJI Yoshinobu KIMURA Masato HIRAMATSU Yukio TANIGUCHI Masakiyo MATSUMURA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/11/01
Vol. E86-C  No. 11 ; pp. 2275-2277
Type of Manuscript:  Special Section LETTER (Special Issue on Electronic Displays)
Category: 
Keyword: 
beam profiler, excimer laser, lateral-grain growth, phase-modulated excimer laser crystallization, 
 Summary | Full Text:PDF