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IEICE Trans

Keyword : phase shift method

Enhancement of Defocus Characteristics with Intermediate Phase Interference in Phase Shift Method
Hiroshi OHTSUKA Toshio ONODERA Kazuyuki KUWAHARA Takashi TAGUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 438-444
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
phase shift method, focus position control, intermediate phase, conjugate twin-shifter, auxiliary shifter, 
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