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IEICE Trans

Keyword : particle source

Identification of the Particle Source in LSI Manufacturing Process Equipment
Yoshimasa TAKII Nobuo AOI Yuichi HIROFUJI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 486-491
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
clean technology, particle, defect, equipment, particle source, 
 Summary | Full Text:PDF