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IEICE Trans

Keyword : ozone

Epitaxial Growth of Bi (2201) Phase in Atomic Layer-by-Layer Deposition by Ion Beam Sputtering Method
Kazuo SAKAI Shinji MIGITA Hiroyuki OTA Hiroshi OTERA Ryozo AOKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/08/25
Vol. E76-C  No. 8 ; pp. 1246-1250
Type of Manuscript:  Special Section PAPER (Special Issue on High-Temperature Superconducting Electronics)
Category: 
Keyword: 
ion beam sputtering, BSCCO(2201), ozone, ultraviolet light, superconductor, buffer layer, 
 Summary | Full Text:PDF
Optimization of Photolithography Developing Process without Residual Surfactant on Surfaces
Hisayuki SHIMADA Shigeki SHIMOMURA Kouichi HIROSE Masanobu ONODERA Tadahiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/07/25
Vol. E75-C  No. 7 ; pp. 844-851
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra Clean Technology)
Category: 
Keyword: 
developer, surfactant, carbon, hydrogen peroxide, ozone, 
 Summary | Full Text:PDF