Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 56

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 202

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 296

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 315
IEICE Trans

Keyword : overlapped etching

Fast Atom Beam (FAB) Processing with Separated Masks
Masahiro HATAKEYAMA Katsunori ICHIKI Tadasuke KOBATA Masayuki NAKAO Yotaro HATAMURA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/02/25
Vol. E78-C  No. 2 ; pp. 174-179
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachines and Micro Electro Mechanical Systems)
Category: 
Keyword: 
fast atom beam (FAB), patterned mask, GaAs, 3-D processing, overlapped etching, 
 Summary | Full Text:PDF