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IEICE Trans

Keyword : optical proximity correction

Application of Technology CAD in Process Development for High Performance Logic and System-on-Chip in IC Foundry
Boon-Khim LIEW Chih-Chiang WANG Carlos H. DIAZ Shien-Yang WU Jack Yuan-Chen SUN Yai-Fen LIN Di-Son KUO Hua-Tai LIN Anthony YEN 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/08/25
Vol. E83-C  No. 8 ; pp. 1275-1280
Type of Manuscript:  INVITED PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99))
Category: Simulation Methodology and Environment
Keyword: 
TCAD, CMOS device, flash, optical proximity correction, 
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