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IEICE Trans

Keyword : offset lithography

Characterisation of Offset Lithographic Films Using Microelectronic Test Structures
Anthony J. WALTON J. Tom M. STEVENSON Leslie I. HAWORTH Martin FALLON Peter S. A. EVANS Blue J. RAMSEY David HARRISON 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/04/25
Vol. E82-C  No. 4 ; pp. 576-581
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: 
Keyword: 
microelectronics, test structure, offset lithography, linewidth, 
 Summary | Full Text:PDF