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IEICE Trans

Keyword : multi-layer structure

Planarized Nb 4-Layer Fabrication Process for Superconducting Integrated Circuits and Its Fabricated Device Evaluation
Shuichi NAGASAWA Masamitsu TANAKA Naoki TAKEUCHI Yuki YAMANASHI Shigeyuki MIYAJIMA Fumihiro CHINA Taiki YAMAE Koki YAMAZAKI Yuta SOMEI Naonori SEGA Yoshinao MIZUGAKI Hiroaki MYOREN Hirotaka TERAI Mutsuo HIDAKA Nobuyuki YOSHIKAWA Akira FUJIMAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2021/09/01
Vol. E104-C  No. 9 ; pp. 435-445
Type of Manuscript:  Special Section PAPER (Special Section on Fabrication of Superconductor Devices; Key Technology in Superconductor Electronics)
Category: 
Keyword: 
superconducting fabrication technology, Nb/AlOx/Nb Josephson junction, caldera planarization, multi-layer structure, single-flux quantum logic, adiabatic quantum flux parametron logic, cell-based design, diagnostic shift-registers, 
 Summary | Full Text:PDF