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IEICE Trans

Keyword : misted deposition method

Preparation of Ferroelectric Sr0. 7Bi2. 3Ta2O9 Thin Films by Misted Deposition Method Using Alkoxide Solution
Ichiro KOIWA Yukihisa OKADA Juro MITA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/04/25
Vol. E81-C  No. 4 ; pp. 590-594
Type of Manuscript:  Special Section LETTER (Special Issue on Advanced Memory Devices Using High-Dielectric-Constant and Ferroelectric Thin Films)
Category: 
Keyword: 
ferroelectric memory, SrBi2Ta2O9 thin film, misted deposition method, alkoxide solution, 
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