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IEICE Trans

Keyword : minimum transferable linewidth

The Analysis of Waveguiding Effects on the Minimum Transferable Linewidth of an Ultrafine X-Ray Mask
Masaki TAKAKUWA Kazuhito FURUYA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C  No. 4 ; pp. 594-599
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
quantum size structure, X-ray lithography, minimum transferable linewidth, electron wave devices, 
 Summary | Full Text:PDF