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IEICE Trans

Keyword : microsystems

Fabrication of Silicon Dioxide Electrets by Plasma CVD Process for Microsystems, and Evaluation of Their Long-Term Charge Stability
Mitsuo ICHIYA Takuro NAKAMURA Shuji NAKATA Jacques LEWINER 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/01/25
Vol. E80-C  No. 1 ; pp. 174-183
Type of Manuscript:  PAPER
Category: Components
Keyword: 
microsystems, sensors, actuators, electrostatic field, electret, silicon dioxide, charge stability, thermally stimulated current, 
 Summary | Full Text:PDF