The 3D Measurement and Analysis of High Precision Surfaces Using Con-Focal Optical Methods John McBRIDEChristian MAUL
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2004/08/01 Vol. E87-CNo. 8 ;
pp. 1261-1267 Type of Manuscript: INVITED PAPER (Special Section on IS-EMD2003--Recent Technical Trend of Electro-Mechanical Devices) Category: Keyword: 3D surface scanning, micro-metrology, MEMS, contact erosion, con-focal methods,