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IEICE Trans

Keyword : metal organic chemical vapor deposition

Thickness Uniformity Improvement of YBa2Cu3Oy (6y7) Films by Metal Organic Chemical Vapor Deposition with a Tapered Inner Tube
Masayuki SUGIURA Yasuhiko MATSUNAGA Kunihiro ASADA Takuo SUGANO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/08/25
Vol. E75-C  No. 8 ; pp. 911-917
Type of Manuscript:  Special Section PAPER (Special Issue on Cryogenic Microwave Devices)
Category: Passive Devices
Keyword: 
oxide superconductor, film, tapered inner tube, metal organic chemical vapor deposition, YBaCuO, 
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