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IEICE Trans

Keyword : low-temperature deposition

Low-Temperature Deposition of Yttrium Oxide on Flexible PET Films Using Time-Separated Yttrium Precursor and Oxidizer Injections
Kentaro SAITO Kazuki YOSHIDA Masanori MIURA Kensaku KANOMATA Bashir AHMMAD Shigeru KUBOTA Fumihiko HIROSE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2022/10/01
Vol. E105-C  No. 10 ; pp. 604-609
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
low-temperature deposition, yttrium oxide, plasma excited humidified argon, 
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