Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C
No. 3 ;
pp. 317-323
Type of Manuscript:
Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Particle/Defect Control and Analysis
Keyword:
semiconductor devices, wafer inspection, scanning electron microscope, objective lens, eucentric stage, acoustic motor, spatial resolution, line-width measurement, BEASTLI, |