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| Keyword : laser-recrystallization
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Characterization of the Laser-Recrystallized Single-Crystalline Si-SiO2 Interface
Nobuo SASAKI | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1992/12/25
Vol. E75-C
No. 12 ;
pp. 1430-1437
Type of Manuscript:
Special Section PAPER (Special Issue on SOI (Si on Insulator) Devices)
Category: SOI Wafers
Keyword:
laser-recrystallization, SOI, interface-charge, | | | Summary | Full Text:PDF | |
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