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IEICE Trans

Keyword : large area plasma

A Uniform and Dense Microwave Plasma
Kazuaki SENDA Koutarou UMEHARA Yuichi SAKAMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/12/01
Vol. E86-C  No. 12 ; pp. 2479-2481
Type of Manuscript:  Special Section PAPER (Special Issue on Recent Trends on Microwave and Millimeter Wave Application Technology)
Category: Plasma
Keyword: 
surface wave, uniform dense plasma, large area plasma, microwave, 
 Summary | Full Text:PDF