Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1996/03/25 Vol. E79-CNo. 3 ;
pp. 398-406 Type of Manuscript: Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology) Category: Device Issues Keyword: TFT, gate insulator, PECVD, ion flux, ion energy,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1992/07/25 Vol. E75-CNo. 7 ;
pp. 839-843 Type of Manuscript: Special Section PAPER (Special Issue on Ultra Clean Technology) Category: Keyword: ion energy, ion flux, contamination, ion energy-flux parameter map,