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IEICE Trans

Keyword : in-line process monitoring

In-line Process Monitoring for Amorphous Oxide Semiconductor TFT Fabrication using Microwave-detected Photoconductivity Decay Technique
Hiroshi GOTO Hiroaki TAO Shinya MORITA Yasuyuki TAKANASHI Aya HINO Tomoya KISHI Mototaka OCHI Kazushi HAYASHI Toshihiro KUGIMIYA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/11/01
Vol. E97-C  No. 11 ; pp. 1055-1062
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
oxide semiconductor, thin film transistor, microwave-detected photoconductivity decay, in-line process monitoring, 
 Summary | Full Text:PDF