Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 56

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 192

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 202

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 271

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 296

Warning: Undefined array key "abst" in /var/www/02search_html/bin/keyword.php on line 315
IEICE Trans

Keyword : gate-last

Gate-Last MISFET Structures and Process for Characterization of High-k and Metal Gate MISFETs
Takeo MATSUKI Kazuyoshi TORII Takeshi MAEDA Yasushi AKASAKA Kiyoshi HAYASHI Naoki KASAI Tsunetoshi ARIKADO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/05/01
Vol. E88-C  No. 5 ; pp. 804-810
Type of Manuscript:  Special Section PAPER (Special Section on Microelectronic Test Structures)
Category: 
Keyword: 
MOSFET, high-k, metal-gate, gate-last, 
 Summary | Full Text:PDF