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IEICE Trans

Keyword : flow sensor

Deformation Control of Metal/Nitride Microbridges
Motohisa TAGUCHI Kaoru KAWATA Tsukasa MATSUURA Kazuhiko TSUTSUMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 221-225
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Actuator
Keyword: 
deformation, microbridge, Pt/SiNx film, residual stress, flow sensor, 
 Summary | Full Text:PDF