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IEICE Trans

Keyword : flexible sheet

Effective Laser Crystallizations of Si Films and the Applications on Panel
Takashi NOGUCHI Tatsuya OKADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/05/01
Vol. E97-C  No. 5 ; pp. 401-404
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
Si, TFT, excimer laser annealing (ELA), blue laser diode annealing (BLDA), Si film, glass, flexible sheet, solar cell, 
 Summary | Full Text:PDF