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IEICE Trans

Keyword : fabrication process

Fabrication Process for Superconducting Digital Circuits
Mutsuo HIDAKA Shuichi NAGASAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2021/09/01
Vol. E104-C  No. 9 ; pp. 405-410
Type of Manuscript:  INVITED PAPER (Special Section on Fabrication of Superconductor Devices; Key Technology in Superconductor Electronics)
Category: 
Keyword: 
superconducting integrated circuits, Josephson junction, fabrication process, controllability, uniformity, defect density, 
 Summary | Full Text:PDF
Improvements in Fabrication Process for Nb-Based Single Flux Quantum Circuits in Japan
Mutsuo HIDAKA Shuichi NAGASAWA Kenji HINODE Tetsuro SATOH 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/03/01
Vol. E91-C  No. 3 ; pp. 318-324
Type of Manuscript:  INVITED PAPER (Special Section on Recent Progress in Superconductive Digital Electronics)
Category: 
Keyword: 
superconductive circuit, Josephson junction, fabrication process, SFQ (Single Flux Quantum) circuit, Nb/AlOx/Nb junction, 
 Summary | Full Text:PDF